Dependence of electron inelastic mean free paths on electron energy and materials at low energy region. I: Elements.

1 January 1990

journal article
Published by The Vacuum Society of Japan in SHINKU

Vol. 33 (2) , 58-62
https://doi.org/10.3131/jvsj.33.58

Abstract

We have proposed a general formula of electron inelastic mean free path (IMFP) to describe the calculated IMFPs over the 50-2000 eV energy range based on the Inokuti's modified Bethe formula for the inelastic scattering cross sec-tion. The IMFPs for 50-2000 eV electrons in 27 elements were calculated using Penn's algorithm. The IMFP dependence on electron energy in the range 50-200 eV varies considerably from materal to material. These variations are associated with substantial differences in the electron energy-loss functions amongst the material. We also found that the modified Bethe formula by Inokuti could be fitted to the calculated IMFPs in the range 50-2000 eV within 3% relative error.

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