Notching as an example of charging in uniform high density plasmas

• 1 January 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (1) , 560-565
• https://doi.org/10.1116/1.588431

Abstract

Keywords

• UNIFORM HIGH
• NOTCHING
• DENSITY PLASMAS
• CHARGING
• EXAMPLE
• HIGH DENSITY