High Resolution, Steep Profile, Resist Patterns

• 6 May 1979
• journal article
• website
• Published by Institute of Electrical and Electronics Engineers (IEEE) in Bell System Technical Journal
• Vol. 58  (5) , 1027-1031
• https://doi.org/10.1002/j.1538-7305.1979.tb03334.x

Abstract

Keywords

• HIGH RESOLUTION
• STEEP PROFILE
• RESIST PATTERNS