Lithium niobate ridge waveguidesfabricated by wet etching
- 16 February 1995
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 31 (4) , 268-269
- https://doi.org/10.1049/el:19950195
Abstract
The authors report a novel method for fabricating proton exchanged LiNbO3 ridge waveguides by the wet etching of proton-exchanged LiNbO3. To demonstrate a simple and easy application of the LiNbO3 ridge waveguide, a Mach-Zehnder interferometric modulator with a selfaligned electrode was fabricated.Keywords
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