Electron Energy Distribution Functions in RF Molecular Plasmas
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Main Features of the Electron Kinetics in Collision Dominated Steady‐State rf PlasmasAnnalen der Physik, 1985
- Kinetic processes in non-equilibrium carbon monoxide discharges. II. Self-consistent electron energy distribution functionsChemical Physics, 1984
- Electron Kinetics of Weakly Ionized HF Plasmas I. Direct Treatment and Fourier ExpansionContributions to Plasma Physics, 1984
- Electron Energy Distribution Functions of Hydrogen: The Effect of Superelastic Vibrational Collisions and of the Dissociation ProcessZeitschrift für Naturforschung A, 1979
- Conduction and Dispersion of Ionized Gases at High FrequenciesPhysical Review B, 1946