Review Of Precision Surface Generating Processes And Their Potential Application To The Fabrication Of Large Optical Components

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Abstract
Over the last decade a wide variety of processes applicable to ultraprecision contouring and polishing have evolved. Examples of these processes include float polishing, elastic emission machining, erosive jet, ion milling, plasma assisted chemical etching, and precision ductile grinding. These processes are reviewed with the intent of comparing their removal rates, resultant surface roughness, demonstrated contour accuracy, and applicability to the manufacture of large optical components. The incentive for this study is the evolution of a deterministic manufacturing process able to lower the cost of fabricating large precision optical components by an order of magnitude.

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