Metastable-Atom Auger Deexcitation Spectroscopy of Clean and Oxygen-Covered Si(111) Surfaces
- 1 September 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (9A) , L683-686
- https://doi.org/10.1143/jjap.23.l683
Abstract
The energy distribution of electrons emitted from clean and oxygen-covered Si(111) surfaces upon impact of metastable He*atoms was measured. The metastable deexcitation at the clean Si(111) surface was shown to occur predominantly via Auger deexcitation mechanism: He*+S→He+S++e- (S: surface). The adsorption process was monitored by this technique with a high sensitivity to the outermost atomic layer. Differences between the present metastable-atom deexcitation spectra and previous photoemission spectra are discussed.Keywords
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