Comparison of instruments for measuring step heights and surface profiles
- 15 November 1985
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 24 (22) , 3766-3772
- https://doi.org/10.1364/ao.24.003766
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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