Impact-actuated linear microvibromotor for micro-optical systems on silicon

17 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 924-926
https://doi.org/10.1109/iedm.1994.383262

Abstract

Electrostatic actuation has received much attention recently for its potential application in microelectromechanical systems. However, in order to generate the forces needed in many applications, very high voltages (>100 V) are often required. Actuators based on impact have been shown to be a feasible alternative. With impact, a very large force of short duration can be delivered to move a microelement. We describe a surface-micromachined linear-motion microvibromotor to perform this function. The microvibromotor offers: large range of motion, high velocity and precise positioning. Our initial application is to position optical elements, such as mirrors or diffraction gratings, in a micro-optical system on silicon.> Author(s) Tien, N.C. Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA Daneman, M. ; Solgaard, O. ; Lau, K.Y. ; Muller, R.S.

Keywords

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