UV/Ozone Cleaning For Organics Removal On Silicon Wafers

• 29 June 1984
• conference paper
• Published by SPIE-Intl Soc Optical Eng
• https://doi.org/10.1117/12.941910

Abstract

Keywords

• OZONE
• WATER
• ION IMPLANTATION
• SILICON
• PHOTOCHEMISTRY
• CARBON DIOXIDE
• CONTAMINATION
• OPTICAL COATINGS