Fracture Tests Of Polysilicon Film
- 1 January 1997
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysiliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1997
- New test structures and techniques for measurement of mechanical properties of MEMS materialsPublished by SPIE-Intl Soc Optical Eng ,1996