Nanometer-size surface features produced by single, low energy, highly charged ions

Abstract
We have studied the interaction of ions with solid surfaces in the limit of slow, highly charged ions (Xe44+ 0.1–20 keV/q). Using atomic force microscopy we are able to see individual ion impact sites on mica, approximately one site per incident ion. Such features are typically circular with ∼20 nm diameter. This damage may be caused by local charge depletion and conversion of the 50 keV Coulomb potential energy of the ions. Contact mode microscopy shows the features to be either pits or blisters depending on scanning direction and force between tip and substrate. By using lateral force microscopy we see the features to be regions of increased friction. The observed surface damage is independent of the ion kinetic energy. Repeated scanning over the same region causes erasure of the observed features.

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