The formation of moulds for 3D microstructures using excimer laser ablation

• 22 November 1996
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 3  (1) , 17-19
• https://doi.org/10.1007/s005420050048

Abstract

Keywords

• FABRICATION
• ABLATION
• LASER
• STRUCTURES
• EXCIMER
• MOULDS
• SURFACE ROUGHNESSES
• FREELY