Characterization of two-dimensional dopant profiles: Status and review

• 1 January 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (1) , 196-201
• https://doi.org/10.1116/1.589028

Abstract

Keywords

• CHARACTERIZATION OF TWO
• DOPANT PROFILES
• DIMENSIONAL DOPANT
• STATUS
• TWO DIMENSIONAL
• REVIEW