Preferential propagation of pores during the formation of porous silicon: A transmission electron microscopy study
- 14 August 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 55 (7) , 675-677
- https://doi.org/10.1063/1.101819
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Fractal micropatterns generated by anodic etchingMicroelectronic Engineering, 1987
- Selective porous silicon formation in buried p+ layersJournal of Applied Physics, 1987
- Microstructure and formation mechanism of porous siliconApplied Physics Letters, 1985
- Structure of Porous Silicon Layer and Heat‐Treatment EffectJournal of the Electrochemical Society, 1978