Ultranarrow Silicon Inverse Taper Waveguide Fabricated with Double-Patterning Photolithography for Low-Loss Spot-Size Converter
- 2 May 2012
- journal article
- research article
- Published by IOP Publishing in Applied Physics Express
- Vol. 5 (5)
- https://doi.org/10.1143/apex.5.052202
Abstract
Using a double-patterning process of i-line photolithography that twice performs a pair of photoresist patterning and dry etching processes, we were able to form an ultranarrow silicon inverse taper waveguide with a tip end width that was much narrower than the resolution limit of photolithography. We fabricated a spot-size converter (SSC) consisting of a 50-mu m-long silicon taper waveguide with gradually decreasing width from 400 to 50 nm and a polyimide second core. The insertion loss of the SSC was 0.55 dB for the transverse electric-like mode, which was the lowest value for an SSC fabricated using photolithography. (c) 2012 The Japan Society of Applied PhysicsThis publication has 9 references indexed in Scilit:
- Dual-Tapered 10-$\mu$m-Spot-Size Converter with Double Core for Coupling Polarization-Independent Silicon Rib Waveguides to Single-Mode Optical FibersApplied Physics Express, 2012
- Ultra-low-loss inverted taper coupler for silicon-on-insulator ridge waveguideOptics Communications, 2010
- Impedance matching vertical optical waveguide couplers for dense high index contrast circuitsOptics Express, 2008
- A silicon-based spot-size converter between single-mode fibers and Si-wire waveguides using cascaded tapersApplied Physics Letters, 2007
- Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithographyIEEE Photonics Technology Letters, 2005
- Fabrication and characterization of three-dimensional silicon tapersOptics Express, 2003
- Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguidesOptics Express, 2003
- Nanotaper for compact mode conversionOptics Letters, 2003
- Low loss mode size converter from 0.3 µm square Si wire waveguides to singlemode fibresElectronics Letters, 2002