Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (ITO) thin films for NO2 gas sensors
- 1 November 1988
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 15 (3) , 235-242
- https://doi.org/10.1016/0250-6874(88)87013-6
Abstract
No abstract availableKeywords
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