Temporal behavior of modulated optical reflectance in silicon
- 1 January 1987
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (1) , 240-248
- https://doi.org/10.1063/1.338863
Abstract
We report on the results of a study of the temporal behavior of the laser-induced modulated optical reflectance from the surfaces of crystalline silicon wafers, epitaxial silicon films, and ion implanted but unannealed silicon wafers. The observed temporal behavior of this signal appears to be associated with the presence and temporal evolution of electronic surface states.This publication has 0 references indexed in Scilit: