A Low Temperature Silicon‐on‐Insulator Fabrication Process Using Si MBE on Double‐Layer Porous Silicon
- 1 May 1998
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 145 (5) , 1668-1671
- https://doi.org/10.1149/1.1838535
Abstract
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