Integrated piezoresistive pressure sensor with both voltage and frequency output
- 31 December 1983
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 4, 113-120
- https://doi.org/10.1016/0250-6874(83)85015-x
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- An integrated pressure transducer for biomedical applicationsSensors and Actuators, 1982
- Fabrication of catheter-tip and sidewall miniature pressure sensorsIEEE Transactions on Electron Devices, 1982
- Integrated signal conditioning for silicon pressure sensorsIEEE Transactions on Electron Devices, 1979
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979
- Silicon Diffused-Element Piezoresistive DiaphragmsJournal of Applied Physics, 1962