Direct aerial image measurement as a method of testing high numerical aperture microlithographic lenses
- 1 November 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (6) , 2686-2691
- https://doi.org/10.1116/1.586585
Abstract
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