Effects of Foreign Gases on the KrF Laser Spectra
- 1 July 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (7) , L473
- https://doi.org/10.1143/jjap.20.l473
Abstract
Gases such as Ne, Ar, Xe, H2, N2, NF3, SF6, CO, CO2 and O2 were added in various amounts to the standard laser mixture, F2/Kr/He=0.3/7.5/92.2, to investigate their effects on the laser power and the absorption spectrum in the excimer continuum at high resolution. Besides the persistent series previously analysed as a self-absorption (A-series), many absorption lines appeared when a small amount of Xe, H2, N2, HF3 or CO was added to the standard mixture. The A-series was found to be enhanced by the addition of O2, and it was found that this series corresponds to the 2–7 band of the Schumann-Range system.Keywords
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