Radio-frequency-sputtered tetragonal barium titanate films on silicon

• 1 March 1979
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 16  (2) , 315-318
• https://doi.org/10.1116/1.569935

Abstract

Keywords

• SILICON
• RADIO FREQUENCY
• FREQUENCY SPUTTERED
• TITANATE FILMS
• TETRAGONAL BARIUM
• BARIUM TITANATE
• SPUTTERED TETRAGONAL