Vacuum-deposited thin-film capacitors of silicon monoxide
- 1 November 1967
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 6 (4) , 261-268
- https://doi.org/10.1016/0026-2714(67)90081-9
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Non-Ohmic Conduction in Vacuum-Deposited SiO FilmsJapanese Journal of Applied Physics, 1965
- Properties of Evaporated Thin Films of SiOJournal of the Electrochemical Society, 1963
- Vacuum deposition of dielectric films for capacitorsVacuum, 1959