Bulk silicides and Si-metal interface reaction:Si
- 15 March 1983
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 27 (6) , 3554-3561
- https://doi.org/10.1103/physrevb.27.3554
Abstract
We report synchrotron-radiation photoemission studies of cleaved Si in which we use Cooper minimum and resonance techniques to identify the bonding Si states 3.5-6.5 eV below , the Si states at 9.3 eV, the nonbonding Pd states centered at 2.5 eV, and hybridized Si-Pd or Pd states within 1.5 eV of . The resonant photoemission technique was shown to yield detailed information about the orbital character of the valence states and to be applicable in principle to all -metal systems. Comparison of bulk Si with palladium silicide thermally grown on Si(111) shows the main emission feature at 2.8 eV shifted 0.3 eV to higher binding energy relative to bulk Si, an increased full width at half maximum (2.5 versus 1.5 eV), and substantially greater emission from Si - metal bonding states. This confirms that the palladium silicide formed on Si is Si rich near the silicide-vacuum interface and shows that the electronic structure of the uppermost silicide layers differs from that of bulk Si.
Keywords
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