Titanium, zirconium, and hafnium tetrahydroborates as "tailored" CVD precursors for metal diboride thin films
- 1 March 1988
- journal article
- Published by American Chemical Society (ACS) in Journal of the American Chemical Society
- Vol. 110 (5) , 1643-1644
- https://doi.org/10.1021/ja00213a058
Abstract
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