Lot-to-lot variations in electromigration performance for thin film microcircuits

Abstract
The variation in electromigration performance measured by the median time to failure (t50) and the standard deviation (σ) of the failure times for a number of lots was studied. It was found that regardless of the metallization technology, a lot-to-lot variation of between 5× and 10× in both t50 and σ can be expected during normal processing. The implications of this finding for predicting chip reliability with regard to electromigration failures are discussed.