On the thermal effect of ion implantation
- 15 May 1983
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 209-210, 1117-1120
- https://doi.org/10.1016/0167-5087(83)90928-6
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Segregation-assisted recoil implantationNuclear Instruments and Methods, 1981