Characterization and optimization of a laser generated plasma source of soft X rays
- 1 May 1988
- journal article
- research article
- Published by Cambridge University Press (CUP) in Laser and Particle Beams
- Vol. 6 (2) , 225-234
- https://doi.org/10.1017/s0263034600003979
Abstract
An investigation into the feasibility of using a laser-generated plasma source of soft X rays as a laboratory based instrument for biological imaging and microlithography is presented. A preliminary characterization of the source has been carried out with carbon, copper and aluminum targets with specific interest in generating a monochromatic source of soft X rays in the ‘water window’. Measurements of X-ray production with respect to angular distribution, effects of cratering and different focusing conditions are reported. Initial conclusions on the optimization of the source for use in biological imaging are drawn.Keywords
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