Scanning probe tips formed by focused ion beams
- 1 September 1991
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 62 (9) , 2167-2171
- https://doi.org/10.1063/1.1142334
Abstract
Probe tips for scanning tunneling microscopy have been sharpened using focused ion beam milling. Reproducible tips were formed on polycrystalline W and Pt‐Ir shanks, but this technique is not limited to these materials. The tips were found to have cone angles of 12±3° and radii of curvature as sharp as 4 nm. Focused ion beam machining allows precise control of the final shape of the tips which is important in metrology measurements of various nanostructure devices.Keywords
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