Studies of the Possible Reaction of WF 6 with SiO2 and Si3 N 4 at Several Temperatures
- 1 August 1992
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 139 (8) , 2331-2337
- https://doi.org/10.1149/1.2221226
Abstract
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