Microstructure and Temperature Coefficient of Resistance of Platinum Films
- 1 February 1997
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 36 (2R)
- https://doi.org/10.1143/jjap.36.834
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Electrical Comparison of Sol-Gel Derived Lead-Zirconate-Titanate Capacitors with Ir and Pt ElectrodesJapanese Journal of Applied Physics, 1995
- Platinum Bottom Electrodes Formed by Electron-Beam Evaporation for High-Dielectric Thin FilmsJapanese Journal of Applied Physics, 1995