Polymerized monomolecular layers: A new class of ultrathin resins for microlithography
- 1 May 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 68 (1) , 91-98
- https://doi.org/10.1016/0040-6090(80)90139-x
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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