Characterization of silicon surface microroughness and tunneling transport through ultrathin gate oxide
- 1 July 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 12 (4) , 1864-1868
- https://doi.org/10.1116/1.579019
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: