Investigation of Pt Bottom Electrodes for "In-Situ" Deposited Pb(Zr,Ti)O₃ (PZT) thin Films

Publisher Website

1 January 1991

journal article
Published by Springer Nature in MRS Proceedings

Vol. 243
https://doi.org/10.1557/proc-243-123

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling
Thin Solid Films, 1985