Microfabrication cellular phosphors

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Abstract
Phosphor screens with densely packed cellular arrays of ∼108 μ and sub-μ diam CsI phosphor columns having ∼10:1 aspect ratios were prepared using microfabrication techniques. Uniformly sized, optically isolated phosphor columns were formed in screens designed for micron-resolution imaging of 5–15 keV x-rays in a microtomography application. Micron-sized cells were prepared by etching fiberoptic faceplates, and smaller cells were formed from a lithographic mask of monodisperse spherical polymer colloidal particles. A defect free lithographic mask of monodisperse colloidal particles was created using a ‘‘Langmuir–Blodgett like’’ coating technique. The cells were then uniformly loaded with CsI (Na activated) phosphor so that variations in the quantum efficiency across the screen were less than 33%.

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