Heterodyne electrostatic force microscopy for non-contact high frequency integrated circuit measurement

5 August 1993

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 29 (16) , 1448-1449
https://doi.org/10.1049/el:19930969

Abstract

A high-resolution non-contact scanned probe potential measurement technique for integrated circuits is presented. Local potentials are extracted by sensing the electrostatic force between an energised probe and the circuit being tested. Using a nulling method, accurate magnitude measurement of high frequency signals can be performed without complex calibration.

Keywords

ENERGISED PROBE
HETERODYNE MICROSCOPY
MAGNITUDE MEASUREMENT
NULLING METHOD
HIGH FREQUENCY INTEGRATED CIRCUIT MEASUREMENT
SCANNED PROBE POTENTIAL MEASUREMENT TECHNIQUE
ELECTROSTATIC FORCE
HIGH FREQUENCY SIGNALS

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