In Situ Laser Light Scattering: I . Detection of Defects Formed during Silicon Molecular Beam Epitaxy
- 1 October 1989
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 136 (10) , 3083-3088
- https://doi.org/10.1149/1.2096405
Abstract
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