Direct evidence for a thermal effect of Ar+ ion bombardment in a conventional sputtering mode
- 1 March 1986
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 4 (2) , 237-238
- https://doi.org/10.1116/1.573478
Abstract
Evidence is presented that the Ar+ ion bombardment for sputtering in Auger electron spectroscopy can heat the target up to 2000 °C if the target has poor heat conduction. Polycrystalline microneedles of Cr exhibited spherical tips after being exposed to 3 keV Ar+ ions, proving that the needle tips were melted by impacting Ar+ ions. Microneedles of Mo ion bombarded under the same condition were bent plastically, which perhaps reflects the thermal annealing of the needles during ion bombardment.Keywords
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