Physical structure of lithium niobate thin films
- 1 November 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Vol. 38 (6) , 640-643
- https://doi.org/10.1109/58.108863
Abstract
Thin films of LiNbO have been RF sputter deposited on silicon and sapphire substrates. A number of analytical techniques have been used to determine the physical structure of these films. This analysis shows that the resulting films are stoichiometric LiNbO/sub 3/ and oriented polycrystalline in nature. It is now possible to consider applications which utilize the unique properties of these films.<>Keywords
This publication has 2 references indexed in Scilit:
- Linear electro-optic effect in sputtered polycrystalline LiNbO3 filmsApplied Physics Letters, 1989
- Frequency doubling in a LiNbO3 thin film deposited on sapphireJournal of Applied Physics, 1983