High Resolution X-ray Lithography: Features of Two-dimensional Patterning.

• 1 January 1997
• journal article
• Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
• Vol. 10  (4) , 619-623
• https://doi.org/10.2494/photopolymer.10.619

Abstract

Keywords

• HIGH RESOLUTION X RAY
• RAY LITHOGRAPHY
• DIMENSIONAL PATTERNING