Adsorption and decomposition of diethyldiethoxysilane on silicon surfaces: New possibilities for SiO2 deposition
- 1 May 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 13 (3) , 865-875
- https://doi.org/10.1116/1.588198
Abstract
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