The 100-kV gas and metal ion source for high current ion implantation
- 1 April 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (4) , 2422-2424
- https://doi.org/10.1063/1.1143827
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Metal vapor vacuum arc ion sourceReview of Scientific Instruments, 1986
- Magnetic multipole line-cusp plasma generator for neutral beam injectorsReview of Scientific Instruments, 1979
- A reliable noble gas duoplasmatron for the 10 mA rangeRadiation Effects, 1979
- Magnetic Multipole Containment of Large Uniform Collisionless Quiescent PlasmasReview of Scientific Instruments, 1973