The Heat Transfer Problem for the Modified Chemical Vapor Deposition Process
- 1 August 1987
- journal article
- Published by ASME International in Journal of Heat Transfer
- Vol. 109 (3) , 642-646
- https://doi.org/10.1115/1.3248136
Abstract
The heat transfer problem related to the modified chemical vapor deposition process has been analyzed in the high Peclet number limit. Variations in the axial, angular, and radial directions are presented. Of particular interest are the effects of tube rotation and variable properties on the temperature profiles.Keywords
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