Two‐Dimensional Ion Implantation Profiles from One‐Dimensional Projections

• 1 October 1985
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 132  (10) , 2476-2480
• https://doi.org/10.1149/1.2113603

Abstract

Keywords

• ION IMPLANTATION