Uniformity in Patterns Imprinted Using Photo-Curable Liquid Polymer

• 30 June 2002
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 41  (Part 1, No) , 4173-4177
• https://doi.org/10.1143/jjap.41.4173

Abstract

Keywords

• THERMAL EXPANSION
• REACTIVE ION ETCHING
• HIGH RESOLUTION
• GRANULATION
• ASPECT RATIO
• HIGH THROUGHPUT