SEM Observation of Self-Healing Breakdown in Thermally Grown SiO[sub 2] Films

• 1 January 1970
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 117  (1) , 127-128
• https://doi.org/10.1149/1.2407417

Abstract

Keywords

• SEM OBSERVATION
• HEALING BREAKDOWN
• THERMALLY GROWN SIO