Effect of Sn in plasma copolymerized methylmethacrylate and tetramethyltin resist on plasma development for x-ray irradiation
- 1 March 1986
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 4 (2) , 500-504
- https://doi.org/10.1116/1.583409
Abstract
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