Benzocyclobutene optical waveguides
- 1 May 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (5) , 535-537
- https://doi.org/10.1109/68.384535
Abstract
Single-mode optical waveguides at 1300 nm have been fabricated from the organic polymer benzocyclobutene. This material system utilizes a 535 rmb photodefinable resin for forming the core of the waveguide, allowing the waveguides to be processed in a fashion similar to a negative photoresist. The processing conditions required for the fabrication of single-mode benzocyclobutene optical waveguides are presented. With the measured losses in the waveguide equal to 0.81 dB/cm at 1300 nm, this material system is suitable for use in a variety of optical interconnect applications.Keywords
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