Structural transformation induced by nitrogen implantation in thin metal films
- 1 February 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 147 (1) , 49-55
- https://doi.org/10.1016/0040-6090(87)90039-3
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- When is thermodynamics relevant to ion-induced atomic rearrangements in metals?Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Nitrogen implantation of metalsJournal of Applied Physics, 1985
- Implantation phases in solidsNuclear Instruments and Methods in Physics Research, 1983
- Factors determining the compound phases formed by oxygen or nitrogen implantation in metalsJournal of Vacuum Science and Technology, 1982
- Formation of chemical compounds by ion bombardment of thin transition metal filmsPhysica Status Solidi (a), 1978